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Nebulizer Dead Volume (µL) TDS (%) Particulates (µm) HF Precision Purity Robustness Material Conikal 5 5 210 No High Good Good Glass SeaSpray 4 20 200* No High Good Good Glass MicroMist 1 15 100* No High Good Good Glass Slurry 11 1 280 No High Good Good Glass OpalMist 4 15 200* Yes High Excellent Good PFA DuraMist 4 30 200* Yes High Good Good PEEK Ceramic VeeSpray 100 30 550 Yes Moderate Good Excellent Ceramic *Particle Size Tolerance (µm): 200 = USS1, USS2, DM2, PFA2; 140 = PFA1, DM1; 100 = USS04, PFA04, DM04; 90 = UM02, UM01, UM005; 70 = PFA005, PFA01, PFA02